Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optimization of multilayer mirrors at 13.4 nm with more than two materials

Not Accessible

Your library or personal account may give you access

Abstract

The design of multilayer mirrors with more than two materials is one of the key technologies for investigating lithography. We study a new procedure for optimizing multilayer mirrors of different combinations of materials at a wavelength of 13.4nm. By adding Be and C layers in different orders to a Si/Mo stack, we have observed enhancement of the reflectivity and a reduction in the number of layers. The Luus–Jaakola optimization procedure has been implemented for the global optimization of the multilayer mirrors. With this algorithm it is not necessary to specify initially the number of layers present in a given design.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity

Mandeep Singh and Joseph J. M. Braat
Appl. Opt. 39(13) 2189-2197 (2000)

Luus-Jaakola optimization procedure for phase-only sampled-fiber Bragg gratings

S. M. Al-Marzoug and R. J. W. Hodgson
Appl. Opt. 47(13) 2275-2280 (2008)

Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm

Julien Gautier, Franck Delmotte, Marc Roulliay, Françoise Bridou, Marie-Françoise Ravet, and Arnaud Jérome
Appl. Opt. 44(3) 384-390 (2005)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved