Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Application of the surface free energy minimization principle to modify the indentation of a polymer mirror structure

Not Accessible

Your library or personal account may give you access

Abstract

This paper successfully used inclined exposure technology to fabricate 45° polymer optical grade micromirrors (1.4mm thick) while applying the surface free energy minimization principle to improve sidewall indentation. This paper tests the effect of the reflow process on the surface roughness of inclined surfaces. Experimental results are considered in light of the theory of minimizing free energy. The smallest surface roughness achieved in the experiments using SU-8 material with a thickness of 1.4mm was less than 20nm. The effect of the reflow process on the surface indentation of inclined microstructures showed that the 1D WYKO profile of maximum height fell from 0.81μm to 0.08μm (Rt), which is an improvement of 90% after the reflow process. This type of micromirror can be used as a key component in Blu-Ray optical pickup heads used in portable, high-density storage systems.

© 2009 Optical Society of America

Full Article  |  PDF Article
More Like This
Design and fabrication of a novel prism for micro-optical system

Kuo-Yung Hung, Chun-Fu Lee, and Yi-Wei Tsai
Appl. Opt. 51(16) 3558-3563 (2012)

Design, fabrication, and characterization of a multidimensional prism

Yun-Ju Chuang, Kuo-Yung Hung, and Yi-Wei Tsai
Appl. Opt. 58(6) 1419-1425 (2019)

Fabrication of microlens arrays based on the mass transport effect of SU-8 photoresist using a multiexposure two-beam interference technique

Cheng Yi Wu, Ting Hsuan Chiang, Ngoc Diep Lai, Danh Bich Do, and Chia Chen Hsu
Appl. Opt. 48(13) 2473-2479 (2009)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved