Loose abrasive slurries for optical glass lapping

Jérôme Neauport; Julie Destribats; Cédric Maunier; Chrystel Ambard; Philippe Cormont; B. Pintault; Olivier Rondeau

doi:10.1364/AO.49.005736

Applied Optics
Vol. 49,
Issue 30,
pp. 5736-5745
(2010)
•https://doi.org/10.1364/AO.49.005736

Loose abrasive slurries for optical glass lapping

Jérôme Neauport, Julie Destribats, Cédric Maunier, Chrystel Ambard, Philippe Cormont, B. Pintault, and Olivier Rondeau

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Jérôme Neauport, Julie Destribats, Cédric Maunier, Chrystel Ambard, Philippe Cormont, B. Pintault, and Olivier Rondeau, "Loose abrasive slurries for optical glass lapping," Appl. Opt. 49, 5736-5745 (2010)

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Related Topics
Table of Contents Category
- Optical Design and Fabrication
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Laser damage (140.3330)
- Polishing (220.5450)

About this Article
History
- Original Manuscript: May 11, 2010
- Revised Manuscript: August 26, 2010
- Manuscript Accepted: September 15, 2010
- Published: October 12, 2010

Abstract

Loose abrasive lapping is widely used to prepare optical glass before its final polishing. We carried out a comparison of 20 different slurries from four different vendors. Slurry particle sizes and morphologies were measured. Fused silica samples were lapped with these different slurries on a single side polishing machine and characterized in terms of surface roughness and depth of subsurface damage (SSD). Effects of load, rotation speed, and slurry concentration during lapping on roughness, material removal rate, and SSD were investigated.

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Abrasive	Diameter Announced by Supplier ( $μm$ )	D50 ( $μm$ )	D90 ( $μm$ )
${Al}_{2} O_{3}$ , supplier A	3	3	6
${Al}_{2} O_{3}$ , supplier A	9	7	10
${Al}_{2} O_{3}$ , supplier A	15	11	16
${Al}_{2} O_{3}$ , supplier A	30	21	30
${Al}_{2} O_{3}$ , supplier B	9	12	17
${Al}_{2} O_{3}$ , supplier B	17	20	28
${Al}_{2} O_{3}$ , supplier B	29	34	59
${Al}_{2} O_{3}$ , supplier C	9	11	16
${Al}_{2} O_{3}$ , supplier C	15	18	25
${Al}_{2} O_{3}$ , supplier C	30	34	52
${Al}_{2} O_{3}$ , supplier D	9	7	10
${Al}_{2} O_{3}$ , supplier D	15	10	15
${Al}_{2} O_{3}$ , supplier D	30	23	31
SiC, supplier B	9	12	17
SiC, supplier B	17	18	24
SiC, supplier B	29	36	57
SiC, supplier B	9	12	17
$B_{4} C$ , supplier B	9	11	16
$B_{4} C$ , supplier B	17	20	26
$B_{4} C$ , supplier B	29	24	32

Sample	Experimental Conditions					Maximal Surface Roughness Rt	SSD Depth	k
Sample	Abrasive	Grain Size	Speed	Load	Concentration	Maximal Surface Roughness Rt	SSD Depth	k
S1	${Al}_{2} O_{3}$ , supplier C	$9 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	3.6	11.7	3.3
S2	${Al}_{2} O_{3}$ , supplier A	$3 µm$	$5 rpm$	$2.8 kg$	$13.3 vol . %$	2.1	7.5	3.6
S3	${Al}_{2} O_{3}$ A	$3 µm$	$25 rpm$	$2.8 kg$	$13.3 vol . %$	1.5	5.1	3.4
S4	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$2.8 kg$	$6.7 vol . %$	3.3	11.9	3.6
S5	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$2.8 kg$	$20 vol . %$	4.9	13.1	2.7
S6	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$1.8 kg$	$13.3 vol . %$	1.6	4.7	2.9
S7	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$2.8 kg$	$6.7 vol . %$	1.5	4.7	3.1
S8	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$0.8 kg$	$13.3 vol . %$	1.6	5	3.1
S9	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$2.8 kg$	$20 vol . %$	1.3	4.3	3.3
S10	${Al}_{2} O_{3}$ A	$15 µm$	$5 rpm$	$2.8 kg$	$13.3 vol . %$	5.1	16.6	3.3
S11	${Al}_{2} O_{3}$ A	$15 µm$	$25 rpm$	$2.8 kg$	$13.3 vol . %$	4.5	11.3	2.5
S12	${Al}_{2} O_{3}$ A	$15 µm$	$70 rpm$	$2.8 kg$	$13.3 vol . %$	3.4	13.8	4.1
S13	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$0.8 kg$	$13.3 vol . %$	4.9	14.1	2.9
S14	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	3.9	12.1	3.1
S15	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$1.8 kg$	$13.3 vol . %$	4.1	11.7	2.9
S16	${Al}_{2} O_{3}$ A	$9 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	2.8	11.2	4.0
S17	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	1.4	4.3	3.1
S18	${Al}_{2} O_{3}$ D	$15 µm$	$5 rpm$	$2.8 kg$	$13.3 vol . %$	4.3	12.1	2.8
S19	${Al}_{2} O_{3}$ D	$15 µm$	$70 rpm$	$2.8 kg$	$13.3 vol . %$	3.1	8.6	2.8
S20	${Al}_{2} O_{3}$ D	$15 µm$	$25 rpm$	$2.8 kg$	$13.3 vol . %$	3.6	11.3	3.1
S21	${Al}_{2} O_{3}$ D	$15 µm$	$50 rpm$	$0.8 kg$	$13.3 vol . %$	5.3	15.5	2.9
S22	${Al}_{2} O_{3}$ D	$15 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	3.4	10.7	3.1
S23	${Al}_{2} O_{3}$ D	$15 µm$	$50 rpm$	$1.8 kg$	$13.3 vol . %$	4.2	12.4	3.0
S24	${Al}_{2} O_{3}$ D	$30 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	6.4	21.7	3.4
S25	${Al}_{2} O_{3}$ C	$30 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	7.5	31.7	4.2
S26	${Al}_{2} O_{3}$ A	$3 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	1.6	6	3.8
S27	${Al}_{2} O_{3}$ A	$15 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.3	12.5	2.9
S28	${Al}_{2} O_{3}$ A	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.1	10.8	3.5
S29	${Al}_{2} O_{3}$ A	$30 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	10.4	25.6	2.5
S30	SiC, supplier B	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.5	13.1	2.9
S31	${Al}_{2} O_{3}$ B	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.2	11.7	3.7
S32	$B_{4} C$ , supplier B	$17 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	7.2	21.1	2.9
S33	SiC, supplier D	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.1	11.6	2.8
S34	$B_{4} C$ , supplier B	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.4	10.7	3.1
S35	$B_{4} C$ , supplier B	$29 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	8.3	29.9	3.6
S36	SiC, supplier B	$17 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	6.7	19.2	2.9
S37	${Al}_{2} O_{3}$ B	$17 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.7	20.4	4.3
S38	SiC, supplier B	$29 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	7.4	30.6	4.1
S39	${Al}_{2} O_{3}$ B	$29 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	6.4	31.5	4.9
S40	${Al}_{2} O_{3}$ D	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.6	12.2	3.4
S41	${Al}_{2} O_{3}$ C	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.6	13.6	3.0
S42	${Al}_{2} O_{3}$ D	$15 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.7	12.9	2.7
S43	${Al}_{2} O_{3}$ C	$15 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.4	18.1	4.1
							Mean k	3.3

Lapping Parameters	Variation Range	Relative Variation of SSD Depth	Relative Variation of MRR
Lapping rotation speed	$5 - 70 rpm$	$- 30 %$	$+ 550 %$
Lapping load	$0.8 - 2.8 kg$	$- 30 %$	$+ 250 %$
Slurry concentration	$6.7 - 26.7 vol . %$	$- 25 %$ (low grain size) $+ 40 %$ (high grain size)	$+ 60 %$
Type of plate	grooved or not	$+ 10 %$	$+ 20 %$
Abrasive grain size	$9 - 30 µm$	$+ 180 %$	$+ 100 %$

Abrasive	Diameter Announced by Supplier ( $μm$ )	D50 ( $μm$ )	D90 ( $μm$ )
${Al}_{2} O_{3}$ , supplier A	3	3	6
${Al}_{2} O_{3}$ , supplier A	9	7	10
${Al}_{2} O_{3}$ , supplier A	15	11	16
${Al}_{2} O_{3}$ , supplier A	30	21	30
${Al}_{2} O_{3}$ , supplier B	9	12	17
${Al}_{2} O_{3}$ , supplier B	17	20	28
${Al}_{2} O_{3}$ , supplier B	29	34	59
${Al}_{2} O_{3}$ , supplier C	9	11	16
${Al}_{2} O_{3}$ , supplier C	15	18	25
${Al}_{2} O_{3}$ , supplier C	30	34	52
${Al}_{2} O_{3}$ , supplier D	9	7	10
${Al}_{2} O_{3}$ , supplier D	15	10	15
${Al}_{2} O_{3}$ , supplier D	30	23	31
SiC, supplier B	9	12	17
SiC, supplier B	17	18	24
SiC, supplier B	29	36	57
SiC, supplier B	9	12	17
$B_{4} C$ , supplier B	9	11	16
$B_{4} C$ , supplier B	17	20	26
$B_{4} C$ , supplier B	29	24	32

Sample	Experimental Conditions					Maximal Surface Roughness Rt	SSD Depth	k
Sample	Abrasive	Grain Size	Speed	Load	Concentration	Maximal Surface Roughness Rt	SSD Depth	k
S1	${Al}_{2} O_{3}$ , supplier C	$9 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	3.6	11.7	3.3
S2	${Al}_{2} O_{3}$ , supplier A	$3 µm$	$5 rpm$	$2.8 kg$	$13.3 vol . %$	2.1	7.5	3.6
S3	${Al}_{2} O_{3}$ A	$3 µm$	$25 rpm$	$2.8 kg$	$13.3 vol . %$	1.5	5.1	3.4
S4	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$2.8 kg$	$6.7 vol . %$	3.3	11.9	3.6
S5	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$2.8 kg$	$20 vol . %$	4.9	13.1	2.7
S6	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$1.8 kg$	$13.3 vol . %$	1.6	4.7	2.9
S7	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$2.8 kg$	$6.7 vol . %$	1.5	4.7	3.1
S8	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$0.8 kg$	$13.3 vol . %$	1.6	5	3.1
S9	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$2.8 kg$	$20 vol . %$	1.3	4.3	3.3
S10	${Al}_{2} O_{3}$ A	$15 µm$	$5 rpm$	$2.8 kg$	$13.3 vol . %$	5.1	16.6	3.3
S11	${Al}_{2} O_{3}$ A	$15 µm$	$25 rpm$	$2.8 kg$	$13.3 vol . %$	4.5	11.3	2.5
S12	${Al}_{2} O_{3}$ A	$15 µm$	$70 rpm$	$2.8 kg$	$13.3 vol . %$	3.4	13.8	4.1
S13	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$0.8 kg$	$13.3 vol . %$	4.9	14.1	2.9
S14	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	3.9	12.1	3.1
S15	${Al}_{2} O_{3}$ A	$15 µm$	$50 rpm$	$1.8 kg$	$13.3 vol . %$	4.1	11.7	2.9
S16	${Al}_{2} O_{3}$ A	$9 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	2.8	11.2	4.0
S17	${Al}_{2} O_{3}$ A	$3 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	1.4	4.3	3.1
S18	${Al}_{2} O_{3}$ D	$15 µm$	$5 rpm$	$2.8 kg$	$13.3 vol . %$	4.3	12.1	2.8
S19	${Al}_{2} O_{3}$ D	$15 µm$	$70 rpm$	$2.8 kg$	$13.3 vol . %$	3.1	8.6	2.8
S20	${Al}_{2} O_{3}$ D	$15 µm$	$25 rpm$	$2.8 kg$	$13.3 vol . %$	3.6	11.3	3.1
S21	${Al}_{2} O_{3}$ D	$15 µm$	$50 rpm$	$0.8 kg$	$13.3 vol . %$	5.3	15.5	2.9
S22	${Al}_{2} O_{3}$ D	$15 µm$	$50 rpm$	$2.8 kg$	$13.3 vol . %$	3.4	10.7	3.1
S23	${Al}_{2} O_{3}$ D	$15 µm$	$50 rpm$	$1.8 kg$	$13.3 vol . %$	4.2	12.4	3.0
S24	${Al}_{2} O_{3}$ D	$30 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	6.4	21.7	3.4
S25	${Al}_{2} O_{3}$ C	$30 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	7.5	31.7	4.2
S26	${Al}_{2} O_{3}$ A	$3 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	1.6	6	3.8
S27	${Al}_{2} O_{3}$ A	$15 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.3	12.5	2.9
S28	${Al}_{2} O_{3}$ A	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.1	10.8	3.5
S29	${Al}_{2} O_{3}$ A	$30 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	10.4	25.6	2.5
S30	SiC, supplier B	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.5	13.1	2.9
S31	${Al}_{2} O_{3}$ B	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.2	11.7	3.7
S32	$B_{4} C$ , supplier B	$17 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	7.2	21.1	2.9
S33	SiC, supplier D	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.1	11.6	2.8
S34	$B_{4} C$ , supplier B	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.4	10.7	3.1
S35	$B_{4} C$ , supplier B	$29 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	8.3	29.9	3.6
S36	SiC, supplier B	$17 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	6.7	19.2	2.9
S37	${Al}_{2} O_{3}$ B	$17 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.7	20.4	4.3
S38	SiC, supplier B	$29 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	7.4	30.6	4.1
S39	${Al}_{2} O_{3}$ B	$29 µm$	$60 rpm$	$2.4 kg$	$6.7 vol . %$	6.4	31.5	4.9
S40	${Al}_{2} O_{3}$ D	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	3.6	12.2	3.4
S41	${Al}_{2} O_{3}$ C	$9 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.6	13.6	3.0
S42	${Al}_{2} O_{3}$ D	$15 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.7	12.9	2.7
S43	${Al}_{2} O_{3}$ C	$15 µm$	$60 rpm$	$2.4 kg$	$20 vol . %$	4.4	18.1	4.1
							Mean k	3.3

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