Abstract

Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function.

© 2010 Optical Society of America

Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates

Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan
Opt. Express 14(11) 4662-4667 (2006)

Spectrally resolved phase-shifting interferometry of transparent thin films: sensitivity of thickness measurements

Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan
Appl. Opt. 45(34) 8636-8640 (2006)

Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter

Daesuk Kim, Soohyun Kim, Hong Jin Kong, and Yunwoo Lee
Opt. Lett. 27(21) 1893-1895 (2002)

Improved optical profiling using the spectral phase in spectrally resolved white-light interferometry

Sanjit Kumar Debnath and Mahendra Prasad Kothiyal
Appl. Opt. 45(27) 6965-6972 (2006)

Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure

Young-Sik Ghim and Seung-Woo Kim
Appl. Opt. 48(4) 799-803 (2009)