Abstract

Glass surface roughness can be considered positive for certain applications in optics. Results of maskless (i.e., lithography-free) reactive-ion-etch runs are given, where (depending on etch parameters) self- masking leads to very different surface morphologies. The latter’s variety allows for virtually any desired scattered visible light power portion, a result that we term dosed scattering. The surfaces are characterized, for example, by the root-mean-square roughness ${\delta }_{\mathrm{rms}}$, while their optical scattering is described by the diffuse transmission as well as the Harvey parameters. Since the wavelengths λ in glass are around ${\delta }_{\mathrm{rms}}$, the shapes of the individual scatterers account for local refraction adding up to the usual scattering.

© 2010 Optical Society of America

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