Design of the double-telecentric high-aperture diffractive–refractive objectives

Grigoriy I. Greisukh; Evgeniy G. Ezhov; Il’ya A. Levin; Sergei A. Stepanov

doi:10.1364/AO.50.003254

Applied Optics
Vol. 50,
Issue 19,
pp. 3254-3258
(2011)
•https://doi.org/10.1364/AO.50.003254

Design of the double-telecentric high-aperture diffractive–refractive objectives

Grigoriy I. Greisukh, Evgeniy G. Ezhov, Il’ya A. Levin, and Sergei A. Stepanov

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Grigoriy I. Greisukh, Evgeniy G. Ezhov, Il’ya A. Levin, and Sergei A. Stepanov, "Design of the double-telecentric high-aperture diffractive–refractive objectives," Appl. Opt. 50, 3254-3258 (2011)

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Abstract

The possibility for achieving optical performance of objectives, including a minimum amount of diffractive lenses, comparable to optical performance of multiple-lens conventional objectives for nanolithography, is considered. The problem of chromatism connected with using excimer lasers is solved by applying aspheric substrates that help to reduce both axial color and spherochromatic aberration.

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Surface	Radius (mm)	Thickness (mm)	Glass	Height of the Marginal Ray (mm)
OBJ	Infinity	287.3098	He	0
1	$- 443.1987$	819.2218	He	37.7
2	$- 1280.631$	0	He	107.4
STO	Infinity	64.30322	He	107.4
4	913.5587	90.13739	He	136.7
5	693.7685	95.52966	He	99.9
6	156.6058	83.49811	He	54.7
IMG	Infinity		He	0

$A_{i}$	DL Number
$A_{i}$	1	2	3	4	5
$A_{1}$ ( ${mm}^{- 2}$ )	$- 19.869689$	56.040478	$- 102.74524$	$- 10.621372$	$- 54.319981$
$A_{2} \cdot 10^{5}$ ( ${mm}^{- 4}$ )	$- 1.8887726$	65.13483	4.75331340	$- 21.704492$	53.030151
$A_{3} \cdot 10^{10}$ ( ${mm}^{- 6}$ )	$- 8.242862$	$- 19.099981$	39.4424690	30.112292	818.58678
$A_{4} \cdot 10^{12}$ ( ${mm}^{- 8}$ )	1.0936901	0.03975243	$- 0.06731953$	$- 0.19243629$	$- 42.771589$
$A_{5} \cdot 10^{16}$ ( ${mm}^{- 10}$ )	$- 8.2001304$	0.13147285	0.027815868	0.094616605	755.18522
$A_{6} \cdot 10^{21}$ ( ${mm}^{- 12}$ )	321.8118	$- 3.4962215$	$- 0.19456995$	$- 0.23737221$	$- 63742.116$
$A_{7} \cdot 10^{25}$ ( ${mm}^{- 14}$ )	$- 537.78452$	4.2255712	0.079937903	0.18501444	338137.1
$A_{8} \cdot 10^{30}$ ( ${mm}^{- 16}$ )	$- 4363.9365$	$- 18.07798$	$- 0.18643156$	$- 0.92261153$	$- 11622452$
$A_{9} \cdot 10^{34}$ ( ${mm}^{- 18}$ )	35025.611	2.9916723	0.023149238	$- 0.59508671$	25904704
$A_{10} \cdot 10^{38}$ ( ${mm}^{- 20}$ )	$- 61655.4$	$- 6.0081373$	0.035728794	0.48191232	$- 36123526$
$A_{11} \cdot 10^{42}$ ( ${mm}^{- 22}$ )	48878.18	5.6851518	$- 0.0007416536$	$- 0.036346262$	28638480
$A_{12} \cdot 10^{46}$ ( ${mm}^{- 24}$ )	$- 15077.195$	$- 1.4657862$	0.00009550324	$- 0.019528944$	$- 98491903$

Surface	Radius (mm)	Thickness (mm)	Glass	Aspheric Coefficients
Surface	Radius (mm)	Thickness (mm)	Glass	$α_{2} \cdot 10^{8}$ ( ${mm}^{- 3}$ )	$α_{3} \cdot 10^{12}$ ( ${mm}^{- 5}$ )	$α_{4} \cdot 10^{16}$ ( ${mm}^{- 7}$ )	$α_{5} \cdot 10^{21}$ ( ${mm}^{- 9}$ )	$α_{6} \cdot 10^{26}$ ( ${mm}^{- 11}$ )
OBJ	Infinity	249.5649	He
1^b	$- 436.7815$	18.64026	Quartz	6.2553508	2.9916508	$- 1.6202947$	7.9844632	8.5076834
2	$- 520.3327$	821.7333	He	4.7869183	1.6836851	0.45838487	0.77473467	5.3779301
3^b	$- 1035.971$	22	Quartz	$- 4.8015559$	$- 0.95445175$	1.1196645	$- 2.751327$	$- 5.6702028$
4	$- 402.0796$	7.165759	He	$- 4.8749757$	$- 0.73894203$	1.1281845	$- 2.9935686$	$- 0.32444361$
STO	Infinity	34.7048	He	0	0	0	0	0
6^b	473.2808	43.66068	Quartz	1.14033	$- 0.77895463$	0.22615553	$- 0.074086238$	$- 1.9119123$
7	$- 1088.204$	82.05441	He	1.5651338	$- 1.1631754$	0.22573172	0.73699362	$- 2.7233357$
8^b	265.1053	28.82128	Quartz	6.7180761	$- 0.88855497$	1.2632154	$- 6.7588587$	58.842132
9	1810.029	109.9292	He	5.2620768	$- 1.1262591$	1.1385633	$- 10.192531$	32.876999
10^b	$- 450.974$	16.42781	Quartz	6.36883	$- 247.14781$	3713.0887	$- 1510099.4$	143726510
11	192.5714	5.29755	He	25.457083	$- 363.5296$	11638.71	$- 4129495.2$	592192770
IMG	Infinity

$A_{i}$	DL Number
$A_{i}$	1	2	3	4	5
$A_{1}$ ( ${mm}^{- 2}$ )	$- 23.230928$	20.761132	$- 23.121712$	$- 26.523918$	$- 110.43176$
$A_{2} \cdot 10^{5}$ ( ${mm}^{- 4}$ )	24.158229	63.442811	7.338327	18.728665	1436.7733
$A_{3} \cdot 10^{10}$ ( ${mm}^{- 6}$ )	289.40011	$- 53.367354$	$- 26.244133$	$- 149.49064$	$- 13943.703$
$A_{4} \cdot 10^{12}$ ( ${mm}^{- 8}$ )	$- 4.9960858$	0.18636296	$- 0.065613498$	$- 0.13795493$	$- 20558.376$
$A_{5} \cdot 10^{16}$ ( ${mm}^{- 10}$ )	6.0952712	$- 0.40582958$	0.056958936	0.31916241	780231.08
$A_{6} \cdot 10^{21}$ ( ${mm}^{- 12}$ )	$- 117.13235$	1.8564063	$- 0.011626909$	$- 0.043268166$	$- 55473355$
$A_{7} \cdot 10^{25}$ ( ${mm}^{- 14}$ )	113.0413	$- 0.18665374$	$- 0.078281018$	0.4623763	$- 7375121800$
$A_{8} \cdot 10^{28}$ ( ${mm}^{- 16}$ )	26.359837	$- 0.052916297$	$- 0.010460894$	0.28292644	21699578000
$A_{9} \cdot 10^{31}$ ( ${mm}^{- 18}$ )	$- 9.9961825$	$- 0.0035009895$	0.0000099103525	$- 0.023377227$	$- 3079578300$
$A_{10} \cdot 10^{33}$ ( ${mm}^{- 20}$ )	0.13810974	0.00011794831	0.0000015672375	0.0003163194	$- 7184466500$
$A_{11} \cdot 10^{36}$ ( ${mm}^{- 22}$ )	$- 0.0092147638$	$- 0.0000083196982$	0.00000008432766	$- 0.000035323888$	11403837000
$A_{12} \cdot 10^{40}$ ( ${mm}^{- 24}$ )	0.0024633311	0.000001932922	$- 0.000000039687196$	0.000011294778	$- 55849599000$

Surface	Radius (mm)	Thickness (mm)	Glass	Height of the Marginal Ray (mm)
OBJ	Infinity	287.3098	He	0
1	$- 443.1987$	819.2218	He	37.7
2	$- 1280.631$	0	He	107.4
STO	Infinity	64.30322	He	107.4
4	913.5587	90.13739	He	136.7
5	693.7685	95.52966	He	99.9
6	156.6058	83.49811	He	54.7
IMG	Infinity		He	0

Abstract

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Figures (3)

Tables (4)

Equations (12)

Applied Optics