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Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure

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Abstract

Using a femtosecond laser incident to an oxide-metal-oxide film engraved with a subwavelength annular aperture (SAA) structure, we generated a Bessel-like beam to ablate silicon. Experimental results show that the silicon can be ablated with a 0.05J/cm2 input ablation threshold at 120 fs pulse duration. We obtained a surface hole possessing a diameter less than 1μm. Optical performance, including depth-of-focus and focal spot of the SAA structure, were simulated using finite-different time-domain calculations. We found that a far-field laser beam propagating through a SAA structure possesses a submicrometer focal spot and high focus intensity. Our method can be easily adopted for surface machining in microfabrication applications.

© 2011 Optical Society of America

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