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Improvement of silicon solar cell efficiency by ion beam sputtered deposition of AlO x N y thin films

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Abstract

Negative charge material, AlOxNy, has been fabricated to passivate the surface of p-type silicon. The fabrication of AlOxNy was possible by using ion beam sputtering deposition to deposit AlN thin film on the surface of a p-type silicon wafer and following annealing in oxygen ambient. Capacitance-voltage analysis shows the fixed charge density has increased from 1011cm2 to 2.26×1012cm2 after annealing. The solar cell efficiency increased from 15.9% to 17.3%, which is also equivalent to the reduction of surface recombination velocity from 1×105 to 32 cm/s.

© 2011 Optical Society of America

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