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Ultrafast web inspection with hybrid dispersion laser scanner

Hongwei Chen, Chao Wang, Akio Yazaki, Chanju Kim, Keisuke Goda, and Bahram Jalali

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Abstract

We report an ultrafast web inspector that operates at a 1000 times higher scan rate than conventional methods. This system is based on a hybrid dispersion laser scanner that performs line scans at nearly 100 MHz. Specifically, we demonstrate web inspection with detectable resolution of 48.6  μm/pixel (scan direction) ×  23  μm (web flow direction) within a width of view of 6 mm at a record high scan rate of 90.9 MHz. We demonstrate the identification and evaluation of particles on silicon wafers. This method holds great promise for speeding up quality control and hence reducing manufacturing costs.

© 2013 Optical Society of America

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