Abstract

We have developed a new method to analyze the amount and distribution of diffraction light for a diffraction grating lens. We have found that diffraction light includes each-order diffraction light and striped diffraction light. In this paper, we describe characteristics of striped diffraction light and suggest a way to analyze diffraction light. Our analysis method, which considers the structure of diffraction grating steps, can simulate the aberrations of an optical system, each-order diffraction light, and striped diffraction light simultaneously with high accuracy. A comparison between the simulation and experimental results is presented, and we also show how our analysis method can be used to optimize a diffraction grating lens with low flare light.

© 2014 Optical Society of America

Phase function design of a diffraction grating lens for an optical imaging system from a Fraunhofer diffraction perspective

Takamasa Ando, Tsuguhiro Korenaga, and Masa-aki Suzuki
Appl. Opt. 52(26) 6543-6548 (2013)

Simulation of relief-type diffractive lenses in ZEMAX using parametric modelling and scalar diffraction

Anna Nemes-Czopf, Dániel Bercsényi, and Gábor Erdei
Appl. Opt. 58(32) 8931-8942 (2019)

Visual axial PSF of diffractive trifocal lenses

Pedro J. Valle, José E. Oti, Vidal F. Canales, and Manuel P. Cagigal
Opt. Express 13(7) 2782-2792 (2005)

Analysis of grating lens aberration

Seiji Nishiwaki
Appl. Opt. 33(13) 2480-2491 (1994)

Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image

Boer Zhu, Xiangzhao Wang, Sikun Li, Guanyong Yan, Lina Shen, and Lifeng Duan
Appl. Opt. 55(12) 3192-3198 (2016)