Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Role of dynamic effects in the characterization of multilayers by means of power spectral density

Not Accessible

Your library or personal account may give you access

Abstract

In this paper, we present measurements of angle- and wavelength-resolved diffuse scattering of EUV radiation on a Mo/Si multilayer. Our sample is optimized for high reflectivity at 13.5 nm wavelength near-normal incidence. We present a rigorous theoretical analysis of the off-specular EUV scattering on the basis of the distorted-wave Born approximation. We prove that the determination of the interface roughness power spectral density (PSD) is only possible by considering geometry-dependent and dynamic contributions. The scattering from multilayer mirrors leads to an intrinsic enhancement in off-specular intensity independent of roughness properties. The thickness oscillations in the scattering intensity (Kiessig fringes) are found to cause additional dynamic enhancement in analogy to Bragg-like peaks for grazing incidence geometry. Considering these effects, the interface PSD is consistently determined.

© 2014 Optical Society of America

Full Article  |  PDF Article
More Like This
Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering

Anton Haase, Victor Soltwisch, Stefan Braun, Christian Laubis, and Frank Scholze
Opt. Express 25(13) 15441-15455 (2017)

Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis

Sven Schröder, Tobias Herffurth, Marcus Trost, and Angela Duparré
Appl. Opt. 49(9) 1503-1512 (2010)

EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates

Sven Schröder, Torsten Feigl, Angela Duparré, and Andreas Tünnermann
Opt. Express 15(21) 13997-14012 (2007)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (23)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved