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Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

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Abstract

A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within ±36pm, and the interferometer proposed was immune from thermal error.

© 2014 Optical Society of America

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