Abstract
We present a design concept of dielectric gratings containing resonant high () and resonant low () index dielectric thin-film layers between the grating and the underlying multilayer reflector. We use numerical simulations and the genetic algorithm optimization method to achieve high diffraction efficiency () in the first diffracted order over a wide wavelength range () at around 800 nm. The basic concept of the structural optimization contains a high refractive index binary grating with alternating low- and high-index reflector layers, the thicknesses of which are also among the optimization parameters. We introduce two resonant dielectric layers directly below the corrugated grating structure and we choose a small () filling fraction for the grating. This concept allows us to broaden the spectral range where high DE can be achieved. We investigate here gratings for both Littrow-mount and off-Littrow applications.
© 2014 Optical Society of America
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