Abstract
We report a novel constrained optimization method for single shot interferogram analysis. The unknown test wavefront is estimated as a minimum L2-norm squared solution whose phase is constrained to the space spanned by a finite number of Zernike polynomials. Using a single frame from standard phase shifting datasets, we demonstrate that our approach provides a phase map that matches with that generated using phase shifting algorithms to within error. Our simulations and experimental results suggest the possibility of a simplified low-cost high quality optical metrology system for performing routine metrology tests involving smooth surface profiles.
© 2014 Optical Society of America
Full Article | PDF ArticleMore Like This
Mandeep Singh and Kedar Khare
J. Opt. Soc. Am. A 34(3) 349-355 (2017)
Sunaina Rajora, Mansi Butola, and Kedar Khare
J. Opt. Soc. Am. A 36(12) D7-D13 (2019)
Eugenio Garbusi, Christof Pruss, and Wolfgang Osten
Appl. Opt. 47(12) 2046-2052 (2008)