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Detection techniques in low-coherence interferometry and their impact on overall measurement accuracy

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Abstract

This paper deals with interference fringe center detection techniques used in low-coherence interferometry for contactless 3D inspection of macroscopic objects. It presents a complex analysis of several frequently used detection techniques and shows their impact on the measurement accuracy. The analysis compares those techniques in terms of computational complexity, measurement accuracy, and resistance to optical dispersion caused by wedge-shaped optical components.

© 2014 Optical Society of America

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