Abstract

The light scattering of interference coatings is strongly dependent on the wavelength. In addition to the general strong increase of scattering as the wavelengths get shorter, dramatic scatter effects in and around the resonance regions can occur. This is discussed in detail for highly reflective and chirped mirrors. A new instrument is presented which enables spectral angle resolved scatter measurements of high-quality optical components to be performed between 250 and 1500 nm.

© 2013 Optical Society of America

Angle-resolved scattering: an effective method for characterizing thin-film coatings

Sven Schröder, Tobias Herffurth, Holger Blaschke, and Angela Duparré
Appl. Opt. 50(9) C164-C171 (2011)

Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis

Sven Schröder, Tobias Herffurth, Marcus Trost, and Angela Duparré
Appl. Opt. 49(9) 1503-1512 (2010)

Instrument for close-to-process light scatter measurements of thin film coatings and substrates

Alexander von Finck, Matthias Hauptvogel, and Angela Duparré
Appl. Opt. 50(9) C321-C328 (2011)

Scattering reduction through oblique multilayer deposition

Marcus Trost, Tobias Herffurth, Sven Schröder, Angela Duparré, and Andreas Tünnermann
Appl. Opt. 53(4) A197-A204 (2014)

Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions

Sven Schröder, Stefan Gliech, and Angela Duparré
Appl. Opt. 44(29) 6093-6107 (2005)