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Spatially resolved surface topography retrieved from far-field intensity scattering measurements

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Abstract

A far-field setup based on the fast and simultaneous recording of 1 million intensity angle-resolved-light-scattering patterns allows both to reconstruct surface topography and to cancel local defects in this topography. A spectral analysis is performed on measured data and allows to extract roughness and slopes mapping of a surface taking into account the spectral bandpass.

© 2014 Optical Society of America

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