Abstract

An asymmetric strip/slot hybrid silicon nitride waveguide is designed to simultaneously realize athermal operation and flat dispersion. The slot filling and upper cladding materials are negative thermal-optical coefficient (TOC), low refractive index polyurethane acrylate, while the left and right cladding layers are positive TOC, high refractive index silicon nitride. With suitable waveguide parameter selection, an optimum strip/slot hybrid silicon nitride waveguide exhibits an effective TOC of $1.263\times {10}^{-7}/\mathrm{K}$ at 1550 nm, flattened dispersion in the wavelength range from 1200 to 1800 nm with the maximum dispersion of 30.51 ps/(nm·km), and a minimum of 10.89 ps/(nm·km). The proposed hybrid waveguide has great potential in building up broadband athermal microresonator optical frequency combs.

© 2016 Optical Society of America

Silicon nitride/titanium oxide hybrid waveguide design enabling broadband athermal operation

Jianbin Ma, Yu Sun, and Shaowu Chen
Appl. Opt. 58(19) 5267-5272 (2019)

Supercontinuum generation in strip/slot hybrid waveguide with flat and low dispersion

Yuchao Zhang, Hongjun Liu, Qibing Sun, Nan Huang, and Zhaolu Wang
Appl. Opt. 54(15) 4850-4856 (2015)

Flattened dispersion in silicon slot waveguides

Lin Zhang, Yang Yue, Raymond G. Beausoleil, and Alan E. Willner
Opt. Express 18(19) 20529-20534 (2010)

Ultrabroadband flat dispersion tailoring of dual-slot silicon waveguides

Ming Zhu, Hongjun Liu, Xuefeng Li, Nan Huang, Qibing Sun, Jin Wen, and Zhaolu Wang
Opt. Express 20(14) 15899-15907 (2012)

Slot–slot waveguide with negative large and flat dispersion covering C+L+U waveband for on-chip photonic networks

Zhanqiang Hui, Min Yang, Deng Pan, Tiantian Zhang, Jiamin Gong, Meizhi Zhang, and Xiangmei Zeng
Appl. Opt. 58(21) 5728-5739 (2019)