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Fabrication of short-wavelength infrared dual-band-pass filter based on combination of Fabry–Perot filters

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Abstract

Dual-band-pass filters are key optical components in dual-spectral detection applications; it is imperative to fabricate them in a relatively simple way for practical use. In this paper, a dual-band-pass filter working in short-wavelength infrared is developed by the combination of two Fabry–Perot (F–P) filters, each having a transparent band. These two filters are designed separately, and deposited at different sides of a substrate. The total layers’ number of the dual-band-pass filter is limited to 34; these layers are monitored by the method of direct transmittance level cut monitoring with a single monitor wavelength. The percent of optical extrema monitoring strategy is adopted in the deposition. The spectra of the F–P filters and the dual-band-pass filter are tested. The shorter pass-band’s average transmittance is above 84%, the longer one is above 88%, and four of the pass-bands’ edge steepness values are 1.4%,2.8%,1.9%, and 1.7%.

© 2016 Optical Society of America

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