Abstract
We introduce a method to measure the dynamic surface deformation of an active stressed lap for fabricating a . Lap surface accuracy working in some typical deformation velocities is put forward. Experimental results indicate that dynamic lap surface accuracy is worse than that of a static surface, and dynamic surface accuracy gets worse if deformation velocity increases, while the difference of lap surface error RMS is less than 1 μm. An optimization of the processing strategy is feasible through changing the deformation velocity of the active stressed lap depending on the processing schedule. After optimizing the grinding and polishing strategy, efficiency is expected to have a significant increase.
© 2016 Optical Society of America
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