Magnetorheological finishing of chemical-vapor deposited zinc sulfide via chemically and mechanically modified fluids

Sivan Salzman; Henry J. Romanofsky; Lucca J. Giannechini; Stephen D. Jacobs; John C. Lambropoulos

doi:10.1364/AO.55.001481

Applied Optics
Vol. 55,
Issue 6,
pp. 1481-1489
(2016)
•https://doi.org/10.1364/AO.55.001481

Magnetorheological finishing of chemical-vapor deposited zinc sulfide via chemically and mechanically modified fluids

Sivan Salzman, Henry J. Romanofsky, Lucca J. Giannechini, Stephen D. Jacobs, and John C. Lambropoulos

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Sivan Salzman, Henry J. Romanofsky, Lucca J. Giannechini, Stephen D. Jacobs, and John C. Lambropoulos, "Magnetorheological finishing of chemical-vapor deposited zinc sulfide via chemically and mechanically modified fluids," Appl. Opt. 55, 1481-1489 (2016)

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- Optics at Surfaces
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About this Article
History
- Original Manuscript: November 3, 2015
- Revised Manuscript: January 11, 2016
- Manuscript Accepted: January 13, 2016
- Published: February 19, 2016

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Abstract

We describe the anisotropy in the material removal rate (MRR) of the polycrystalline, chemical-vapor deposited zinc sulfide (ZnS). We define the polycrystalline anisotropy via microhardness and chemical erosion tests for four crystallographic orientations of ZnS: (100), (110), (111), and (311). Anisotropy in the MRR was studied under magnetorheological finishing (MRF) conditions. Three chemically and mechanically modified magnetorheological (MR) fluids at pH values of 4, 5, and 6 were used to test the MRR variations among the four single-crystal planes. When polishing the single-crystal planes and the polycrystalline with pH 5 and pH 6 MR fluids, variations were found in the MRR among the four single-crystal planes and surface artifacts were observed on the polycrystalline material. When polishing the single-crystal planes and the polycrystalline with the modified MR fluid at pH 4, however, minimal variation was observed in the MRR among the four orientations and a reduction in surface artifacts was achieved on the polycrystalline material.

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Component	Density ( $g / {cm}_{3}$ )	Volume (mL)	Mass (g)	Volume %	Mass %
Zirconia-coated carbonyl iron (CI) powder	6.72	384.80	2583.93	38.60	80.67
Polyethylene-imine (PEI)	1.10	69.68	76.65	6.99	2.39
DI water	1.00	542.36	542.36	54.41	16.93
Total		996.84	3202.94	100.00	99.99

	Vickers Microhardness, $H_{V}$ (GPa)
Source	(100)	(110)	(111)	(311)	CVD ZnS	Relative to (100) Plane
Our work (100 g)	$1.89 \pm 0.03$	$1.71 \pm 0.04$	$2.93 \pm 0.04$	$2.17 \pm 0.12$	$1.94 \pm 0.05$ (200 g)	1.00; 0.91; 1.55; 1.15
Westbrook and Jorgensen [14]; wet (50 g)	1.50	1.80	2.00	N/A	N/A	1.00; 1.20; 1.33; N/A
Westbrook and Jorgensen [14]; dry (50 g)	1.32	1.61	1.87	N/A	N/A	1.00; 1.22; 1.42; N/A
Li et al. [15]	2.08	2.32	2.90	2.26^a	N/A	1.00; 1.12; 1.39; 1.09

	(100)	(110)	(111)	(311)	CVD ZnS	Relative to (100) Plane
Nominal etch rate (nm/min)	$13.29 \pm 1.26$	$13.83 \pm 0.59$	$9.29 \pm 0.49$	$15.29 \pm 0.83$	$14.5 \pm 0.6$	1.00; 1.04; 0.70; 1.15

	(100)	(110)	(111)	(311)	Relative to (100) Plane
Planar density ( $atoms / {nm}^{2}$ )	0.79	0.56	0.91	0.45	1.00; 0.70; 1.15; 0.57
Bond density ( $bonds / {nm}^{2}$ )	13.67	14.50	39.45	24.71	1.00; 1.06; 2.89; 1.81

	Average Peak Removal Rate $\times 100 (μm / \min$ )
Orientation	pH 4	pH 5	pH 6
(100)	$6.00 \pm 1.35$	$9.17 \pm 0.57$	$12.93 \pm 0.78$
(110)	$5.87 \pm 0.93$	$8.93 \pm 1.18$	$12.13 \pm 1.16$
(111)	$5.37 \pm 0.67$	$10.43 \pm 1.53$	$14.03 \pm 1.12$
(311)	$5.27 \pm 0.31$	$8.13 \pm 1.72$	$12.07 \pm 0.57$
Average of all orientations	$5.63 \pm 0.35$	$9.17 \pm 0.95$	$12.79 \pm 0.91$

	Average Volumetric Removal Rate $\times 10^{5} ({μm}^{3} / \min)$
Orientation	pH 4	pH 5	pH 6
(100)	$4.24 \pm 0.61$	$7.58 \pm 0.85$	$7.83 \pm 0.97$
(110)	$4.39 \pm 0.68$	$7.10 \pm 1.62$	$7.16 \pm 0.79$
(111)	$4.28 \pm 0.13$	$8.66 \pm 1.33$	$8.20 \pm 0.42$
(311)	$4.04 \pm 0.73$	$7.09 \pm 1.44$	$7.52 \pm 0.55$
Average of all orientations	$4.24 \pm 0.15$	$7.61 \pm 0.74$	$7.68 \pm 0.44$

	Prepolished	pH 4		pH 5		pH 6
Orientation	Areal rms (nm)	Areal rms (nm)	Line rms (nm)	Areal rms (nm)	Line rms (nm)	Areal rms (nm)	Line rms (nm)
100	$1.71 \pm 0.22$	$9.73 \pm 4.39$	$4.38 \pm 1.40$	$10.54 \pm 2.83$	$4.34 \pm 2.01$	$16.15 \pm 3.65$	$8.08 \pm 4.92$
110	$1.73 \pm 0.35$	$8.21 \pm 3.25$	$3.55 \pm 1.00$	$12.64 \pm 5.68$	$3.78 \pm 1.47$	$19.03 \pm 4.53$	$6.07 \pm 1.89$
111	$1.69 \pm 0.36$	$8.27 \pm 2.32$	$4.24 \pm 1.05$	$14.35 \pm 3.14$	$4.19 \pm 1.19$	$22.89 \pm 8.76$	$5.24 \pm 2.23$
311	$2.84 \pm 1.97$	$8.71 \pm 3.23$	$3.39 \pm 1.29$	$13.22 \pm 5.63$	$3.25 \pm 0.90$	$18.14 \pm 5.82$	$4.13 \pm 1.25$

	pH 4	pH 5	pH 6
Areal rms (μm)	18	44	66
Lineout profiles rms (μm)	$16.4 \pm 2$	$38.8 \pm 9$	$60.5 \pm 20$

	pH 4	pH 5	pH 6
Areal rms (μm)	18	44	66
Lineout profiles rms (μm)	$16.4 \pm 2$	$38.8 \pm 9$	$60.5 \pm 20$

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Applied Optics