Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Design and performance analysis of an ultraprecision ion beam polishing tool

Not Accessible

Your library or personal account may give you access

Abstract

First, we introduce requirements for the ion beam polishing tool used in the subnanometer precision process. Based on the ion beam figuring (IBF) principle, the definitive factor of the IBF capability is analyzed, and the deficiencies of the ion beam polishing tool are identified. The effect of focused ion optics on the ion beam removal function is based on theoretic calculation and computer simulation; and focused three-grid ion optics are developed and tested. Finally, a 150 mm flat optics element is figured and results show that the contour error decreases from 15.58 nm RMS to 0.796 nm RMS, demonstrating that the ion beam polishing tool is very efficient for optical IBF.

© 2016 Optical Society of America

Full Article  |  PDF Article
More Like This
Improve optics fabrication efficiency by using a radio frequency ion beam figuring tool

Ying Lu, Xuhui Xie, Lin Zhou, Zuocai Dai, and Guiyang Chen
Appl. Opt. 56(2) 260-266 (2017)

Structure optimization and fabricating capability analysis of an ion-beam machine for a subnanometer optical surface

Mingjin Xu, Yifan Dai, Xuhui Xie, Lin Zhou, and Wenlin Liao
Appl. Opt. 54(27) 8055-8061 (2015)

Ion beam figuring approach for thermally sensitive space optics

Xiaolin Yin, Weijie Deng, Wa Tang, Binzhi Zhang, Donglin Xue, Feng Zhang, and Xuejun Zhang
Appl. Opt. 55(28) 8049-8055 (2016)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (19)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved