Abstract
In this work we present the theoretical background and experimental procedure to measure the thickness of thin films by analyzing Fresnel diffraction patterns obtained from polychromatic illumination of phase-step samples. As examples of this technique, we measured the thicknesses of thin aluminum layers on glass substrates using three different broad-spectrum light sources. The results are in excellent agreement with independent interferometric measurements within less than 5% relative uncertainties.
© 2016 Optical Society of America
Full Article | PDF ArticleMore Like This
Mohammad Taghi Tavassoly, Iman Moaddel Haghighi, and Khosrow Hassani
Appl. Opt. 48(29) 5497-5501 (2009)
Ali Motazedifard, S. Dehbod, and A. Salehpour
J. Opt. Soc. Am. A 35(12) 2010-2019 (2018)
Meng-Chi Li, Der-Shen Wan, and Cheng-Chung Lee
Appl. Opt. 51(36) 8579-8586 (2012)