Abstract
Phase-shifting infrared digital holographic microscopy based on a homemade all-fiber variable phase shifter is presented to quantitatively obtain the phase distribution of an object wave carrying the information of a transparent specimen in the infrared band. The all-fiber variable phase shifter, which consists of a tubular piezoelectric transducer (PZT) and a single-mode fiber, can accurately produce any phase shift between 0 and by modulating the driving voltage of the tubular PZT. Taking measurements of different staircase structures on a silicon wafer as samples, two configurations are presented based on different phase-shifting implementations: one is a slight off-axis two-step phase shift and the other is an in-line four-step phase shift. The reconstructed results prove the validity of this method.
© 2017 Optical Society of America
Full Article | PDF ArticleMore Like This
Ye Lin, Liping Yan, Jiandong Xie, Liu Huang, Yingtian Lou, and Benyong Chen
Appl. Opt. 61(14) 3945-3951 (2022)
Alexey Brodoline, Daniel Alexandre, and Michel Gross
Appl. Opt. 61(15) 4296-4302 (2022)
Peng Gao, Baoli Yao, Irina Harder, Junwei Min, Rongli Guo, Juanjuan Zheng, and Tong Ye
J. Opt. Soc. Am. A 28(3) 434-440 (2011)