Abstract
This paper presents a novel non-iterative and robust algorithm in phase-shifting interferometry of three unknown and unequal phase steps. First, the modulation light and the object phase are algebraically eliminated; second, the background light is approximated to a 2- polynomial of degree and estimated by applying the least squares method; third the phase steps are obtained, and finally, the object phase is computed. This idea is theoretically described and verified numerically and experimentally for several values of .
© 2017 Optical Society of America
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