Abstract

The movement flatness error is one of the critical parameters of motorized stage performance. In this work, the measurement of the movement flatness error based on an astigmatic method is proposed, in which the focus error signal is detected and used to analyze the movement flatness error. The theoretical derivation and analysis are presented, and the experimental system is established accordingly. The experimental results indicate that our measurement method and established system exhibit an accuracy of less than $\pm 100\mathrm{nm}$. The movement flatness error of an $x–y$ stepping motorized stage is measured using the established system, and the movement flatness error profile is mapped; it is determined that the maximum movement flatness error is within 1.3 μm in our experiment. The proposed method is hence proven to be an effective way of measuring the movement flatness error of motorized stages.

© 2017 Optical Society of America

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