## Abstract

In order to achieve the deterministic finishing of optical components with concave surfaces of a curvature radius less than 10 mm, a novel magnetorheological finishing (MRF) process using a small ball-end permanent-magnet polishing head with a diameter of 4 mm is introduced. The characteristics of material removal in the proposed MRF process are studied. The model of the material removal function for the proposed MRF process is established based on the three-dimensional hydrodynamics analysis and Preston’s equation. The shear stress on the workpiece surface is calculated by means of resolving the presented mathematical model using a numerical solution method. The analysis result reveals that the material removal in the proposed MRF process shows a positive dependence on shear stress. Experimental research is conducted to investigate the effect of processing parameters on the material removal rate and improve the surface accuracy of a typical rotational symmetrical optical component. The experimental results show that the surface accuracy of the finished component of K9 glass material has been improved to 0.14 μm (PV) from the initial 0.8 μm (PV), and the finished surface roughness Ra is 0.0024 μm. It indicates that the proposed MRF process can be used to achieve the deterministic removal of surface material and perform the nanofinishing of small curvature radius concave surfaces.

© 2017 Optical Society of America

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