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Uncertainty analysis for the determination of B4C optical constants by angle-dependent reflectance measurement for 40 nm to 80 nm wavelength

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Abstract

The index of refraction and the extinction coefficient for thin films of boron carbide were determined by angle-dependent reflectance measurements in the vacuum-ultraviolet spectral range. The numerical approximation was done using transfer-matrix formalism in combination with particle swarm optimization for the fitting algorithm. By this, not only for the reflectance measurement but also for the numerical approximation, a profound uncertainty budget was developed. This includes possible effects due to contamination and intermediate layers. Thus it was possible to establish a method for determination of n and k with reliable and highly traceable uncertainties, and to significantly improve the consistency of existing data required for current developments in optical technology.

© 2017 Optical Society of America

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