Abstract
A simple, precise, and innovative technique for wavefront aberration measurement is presented in this paper. This technique is based on transmitted fringe deflectometry (TFD) used to measure wavefront slope and wavefronts. The system measurement error when measuring wavefront aberration is analyzed, including the aberration of the reference wavefront caused by shape distribution and the tilt and decentration of the phase object. Based on this, the system error model is established, and the system error compensation method is also presented. In addition, the system parameters calibration method is discussed in detail. Simulation and experimental results show that the proposed TFD wavefront aberration measurement model can achieve high measurement accuracy.
© 2017 Optical Society of America
Full Article | PDF ArticleMore Like This
Daodang Wang, Yamei Yin, Jinchao Dou, Ming Kong, Xinke Xu, Lihua Lei, and Rongguang Liang
Appl. Opt. 60(7) 1973-1981 (2021)
Mengyang Li, Dahai Li, Chengying Jin, Kewei E, Xiaodong Yuan, Zhao Xiong, and Qionghua Wang
Appl. Opt. 56(13) F144-F151 (2017)
Jitendra Dhanotia, Vimal Bhatia, and Shashi Prakash
Appl. Opt. 56(8) 2346-2352 (2017)