Abstract

This paper presents an enhanced differential plane mirror interferometer with high resolution for measuring straightness. Two sets of space symmetrical beams are used to travel through the measurement and reference arms of the straightness interferometer, which contains three specific optical devices: a Koster prism, a wedge prism assembly, and a wedge mirror assembly. Changes in the optical path in the interferometer arms caused by straightness are differential and converted into phase shift through a particular interferometer system. The interferometric beams have a completely common path and space symmetrical measurement structure. The crosstalk of the Abbe error caused by pitch, yaw, and roll angle is avoided. The dead path error is minimized, which greatly enhances the stability and accuracy of the measurement. A measurement resolution of 17.5 nm is achieved. The experimental results fit well with the theoretical analysis.

© 2017 Optical Society of America

Laser homodyne straightness interferometer with simultaneous measurement of six degrees of freedom motion errors for precision linear stage metrology

Yingtian Lou, Liping Yan, Benyong Chen, and Shihua Zhang
Opt. Express 25(6) 6805-6821 (2017)

High-sensitivity roll-angle interferometer

Yanfen Le, Wenmei Hou, Kai Hu, and Kai Shi
Opt. Lett. 38(18) 3600-3603 (2013)

Roll angle measurement system based on differential plane mirror interferometer

Kai Shi, Junhong Su, and Wenmei Hou
Opt. Express 26(16) 19826-19834 (2018)

Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters

Benyong Chen, Bin Xu, Liping Yan, Enzheng Zhang, and Yanna Liu
Opt. Express 23(7) 9052-9073 (2015)

Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error

Shuai Gao, Bin Zhang, Qibo Feng, Cunxing Cui, Shiqian Chen, and Yuqiong Zhao
Appl. Opt. 54(3) 458-466 (2015)