Abstract

A monolithic thin-film buckling process was used to fabricate arrays of high-finesse ($\sim 2\times {10}^3$) curved-mirror Fabry–Perot cavities on a silicon chip, with areal density $\sim {10}^4$ per square centimeter. The cavity shape matches the predictions of elastic buckling theory, with maximum curvature at the center where the fundamental mode resides. We describe cavities with mode volume $<1.5{\lambda }^3$ for the fundamental spatial resonance. We also describe cavities connected to air-core channels. Preliminary light-coupling results suggest that these structures have potential to enable the side coupling of gases, liquids, and pump, probe, or trapping beams.

© 2017 Optical Society of America

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