Investigation of the refractive index repeatability for tantalum pentoxide coatings, prepared by physical vapor film deposition techniques

O. Stenzel; S. Wilbrandt; J. Wolf; M. Schürmann; N. Kaiser; D. Ristau; H. Ehlers; F. Carstens; S. Schippel; L. Mechold; R. Rauhut; M. Kennedy; M. Bischoff; T. Nowitzki; A. Zöller; H. Hagedorn; H. Reus; T. Hegemann; K. Starke; J. Harhausen; R. Foest; J. Schumacher

doi:10.1364/AO.56.00C193

Applied Optics
Vol. 56,
Issue 4,
pp. C193-C200
(2017)
•https://doi.org/10.1364/AO.56.00C193

Investigation of the refractive index repeatability for tantalum pentoxide coatings, prepared by physical vapor film deposition techniques

O. Stenzel, S. Wilbrandt, J. Wolf, M. Schürmann, N. Kaiser, D. Ristau, H. Ehlers, F. Carstens, S. Schippel, L. Mechold, R. Rauhut, M. Kennedy, M. Bischoff, T. Nowitzki, A. Zöller, H. Hagedorn, H. Reus, T. Hegemann, K. Starke, J. Harhausen, R. Foest, and J. Schumacher

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O. Stenzel, S. Wilbrandt, J. Wolf, M. Schürmann, N. Kaiser, D. Ristau, H. Ehlers, F. Carstens, S. Schippel, L. Mechold, R. Rauhut, M. Kennedy, M. Bischoff, T. Nowitzki, A. Zöller, H. Hagedorn, H. Reus, T. Hegemann, K. Starke, J. Harhausen, R. Foest, and J. Schumacher, "Investigation of the refractive index repeatability for tantalum pentoxide coatings, prepared by physical vapor film deposition techniques," Appl. Opt. 56, C193-C200 (2017)

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Abstract

Random effects in the repeatability of refractive index and absorption edge position of tantalum pentoxide layers prepared by plasma-ion-assisted electron-beam evaporation, ion beam sputtering, and magnetron sputtering are investigated and quantified. Standard deviations in refractive index between $4 * 10^{- 4}$ and $4 * 10^{- 3}$ have been obtained. Here, lowest standard deviations in refractive index close to our detection threshold could be achieved by both ion beam sputtering and plasma-ion-assisted deposition. In relation to the corresponding mean values, the standard deviations in band-edge position and refractive index are of similar order.

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Deposition Method	Sample Set	Deposition $Rate / nm s^{- 1}$	$Z_{j}$	$⟨ n at 440 nm ⟩$	$δ n$ at 440 nm	$⟨ E_{04} ⟩ / eV$	$δ E_{04} / eV$
IBS	IBS_01	0.1	5	2.24906	0.00044	4.26808	0.00194
	IBS_02	0.192	4	2.27661	0.00091	4.25783	0.00034
	IBS_03	0.1	5	2.25387	0.00257	4.28506	0.00920
	IBS_04	0.18	4	2.27333	0.00372	4.25207	0.00936
	IBS_05	0.31	5	2.17391	0.00090	4.34878	0.00164
	IBS_06	0.161–0.167	5	2.22174	0.00198	4.30417	0.00674
PIAD	PIAD_01	0.2	5	2.20096	0.00064	4.31544	0.00269
	PIAD_02	0.3	5	2.21437	0.00198	4.30814	0.00177
	PIAD_03	0.4	5	2.27060	0.00058	4.26632	0.00048
	PIAD_04	0.5	5	2.22818	0.00056	4.28982	0.00156
	PIAD_05	0.22	5	2.17416	0.00121	4.33945	0.00181
	PIAD_06	0.28	5	2.21727	0.00121	4.30663	0.00217
	PIAD_07	0.12	5	2.22143	0.00285	4.30283	0.00396
MS	MS_01	0.2	5	2.16097	0.00191	4.31204	0.00085
	MS_02	0.4	5	2.19895	0.00120	4.29424	0.00097
	MS_03	0.590–0.592	5	2.23969	0.00131	4.28029	0.00107

Sample Sets	Range of Standard Deviations $δ n$		Probability Value $p$	Range of Standard Deviations $δ E_{04}$ in eV		Probability Value $p$
Sample Sets	Minimum	Maximum	Probability Value $p$	Minimum	Maximum	Probability Value $p$
All PIAD	0.0005	0.0030	0.33	0.0005	0.0040	0.12
All IBS	0.0004	0.0040	0.30	0.0003	0.0094	0.37
All MS	0.0010	0.0020	0.52	0.0008	0.0010	0.96
All together	0.0004	0.0040	0.32	0.0003	0.0094	0.09

Deposition Method	Sample Set	Deposition $Rate / nm s^{- 1}$	$Z_{j}$	$⟨ n at 440 nm ⟩$	$δ n$ at 440 nm	$⟨ E_{04} ⟩ / eV$	$δ E_{04} / eV$
IBS	IBS_01	0.1	5	2.24906	0.00044	4.26808	0.00194
	IBS_02	0.192	4	2.27661	0.00091	4.25783	0.00034
	IBS_03	0.1	5	2.25387	0.00257	4.28506	0.00920
	IBS_04	0.18	4	2.27333	0.00372	4.25207	0.00936
	IBS_05	0.31	5	2.17391	0.00090	4.34878	0.00164
	IBS_06	0.161–0.167	5	2.22174	0.00198	4.30417	0.00674
PIAD	PIAD_01	0.2	5	2.20096	0.00064	4.31544	0.00269
	PIAD_02	0.3	5	2.21437	0.00198	4.30814	0.00177
	PIAD_03	0.4	5	2.27060	0.00058	4.26632	0.00048
	PIAD_04	0.5	5	2.22818	0.00056	4.28982	0.00156
	PIAD_05	0.22	5	2.17416	0.00121	4.33945	0.00181
	PIAD_06	0.28	5	2.21727	0.00121	4.30663	0.00217
	PIAD_07	0.12	5	2.22143	0.00285	4.30283	0.00396
MS	MS_01	0.2	5	2.16097	0.00191	4.31204	0.00085
	MS_02	0.4	5	2.19895	0.00120	4.29424	0.00097
	MS_03	0.590–0.592	5	2.23969	0.00131	4.28029	0.00107

Sample Sets	Range of Standard Deviations $δ n$		Probability Value $p$	Range of Standard Deviations $δ E_{04}$ in eV		Probability Value $p$
Sample Sets	Minimum	Maximum	Probability Value $p$	Minimum	Maximum	Probability Value $p$
All PIAD	0.0005	0.0030	0.33	0.0005	0.0040	0.12
All IBS	0.0004	0.0040	0.30	0.0003	0.0094	0.37
All MS	0.0010	0.0020	0.52	0.0008	0.0010	0.96
All together	0.0004	0.0040	0.32	0.0003	0.0094	0.09

Abstract

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Figures (9)

Tables (2)

Equations (10)

Applied Optics