Abstract

The effect of a passive facet on diffraction efficiency of multilayer diffraction optical elements (MLDOEs) was analyzed, and the mathematical model of polychromatic integral diffraction efficiency affected by a passive blazed facet for MLDOEs is presented. We found the passive facet could cause a significant reduction in polychromatic integral diffraction efficiency in the working waveband. The reduction of diffraction efficiency is quantitatively described by the shielding effect, which is caused by the sidewall slope of sawtooth-shaped MLDOEs. Through rigorous calculations, our shielding model is consistent with the numerical results. The analysis results can be utilized for fabrication of MLDOEs, and our shielding model of the passive facet can be applied to predict the optical performance of MLDOEs and refractive-diffractive hybrid imaging optical systems.

© 2018 Optical Society of America

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