Abstract
A stand-off laser-induced breakdown spectroscopy (LIBS) system was developed to determine the elemental composition of contamination particles during semiconductor manufacturing. It successfully detected laboratory-generated monodisperse ( and 300 nm) particles and internally mixed particles of , , NaCl, and KCl. Temperature and pressure effects on the LIBS emission signals were investigated. The peak area and signal-to-noise ratio of the emission lines increased with the temperature (25°C–250°C). Stronger emission lines were observed at higher pressure. Although temperature and pressure affect the LIBS signals, the developed stand-off LIBS could be employed for real-time detection of the elemental composition of contamination particles.
© 2018 Optical Society of America
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