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Batch-producible MEMS fiber-optic Fabry–Perot pressure sensor for high-temperature application

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Abstract

A fiber-optic Fabry–Perot pressure sensor based on a micro-electro-mechanical system (MEMS) and CO2 laser fusion technology is developed and experimentally demonstrated for high-temperature application. The sensing heads are batch-fabricated by anodically bonding the micromachined Pyrex glass wafer and local gold-plated silicon wafer. The separated sensing head and the single-mode fiber are fused together to form the Fabry–Perot cavity using the CO2 laser. In order to improve the measurement accuracy in a high-temperature environment, a fiber Bragg grating is used as a temperature sensor for temperature decoupling. The experimental results show that the fiber-optic Fabry–Perot pressure sensor has a maximum nonlinearity of 0.4%. The maximal error of the pressure after temperature decoupling is less than 1.05% over a pressure range of 0–0.5 MPa and a temperature range of 20°C–350°C. The batch fabrication technology makes the sensors low cost and high uniformity.

© 2018 Optical Society of America

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