Abstract
A simple volumetric thickness measurement method for in-line high-speed inspection is proposed. With a color camera alone, spectrally resolved reflectance in a spatial domain is obtained: a Bayer filter spectrally resolves the reflected signal, and a CMOS sensor acquires three multi-spectral reflectances from RGB data at a single shot. To determine an accurate thickness, a modified reflectance is derived to convert a conventional spectral reflectance throughout a wavelength domain into an adequate form in an RGB domain by considering the characteristics of wide-band multi-spectral acquisition. The proposed method is validated by the measurement of a uniformly deposited film and a tapered film.
© 2018 Optical Society of America
Full Article |
PDF Article
More Like This
References
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Figures (11)
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Tables (1)
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Equations (12)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription