Abstract

A three-coordinate heterodyne laser interferometer has been developed to measure the displacement of the probe microscope scanner with a subnanometer resolution that provides traceability of measurements to the standard of meter through the wavelength of a stabilized He–Ne laser. Main sources of errors are investigated, and their influence is minimized so that the resulting measurement uncertainty of the system does not exceed 0.2 nm, and the resolution is 0.01 nm. The investigation of metrological characteristics of the three-coordinate interferometer was carried out with a scanning probe microscopy (SPM) NanoScan-3D using TGZ-type calibration gratings. The values measured with SPM fell within the 95% confidence interval given by Physikalisch-Technische Bundesanstalt (PTB) (Germany). SPM equipped with a laser interferometer was used to measure the characteristics of dynamic etalons of geometric dimensions.

© 2019 Optical Society of America

Optical characterization of the active push–pull cell for the 2.1 m telescope at OAN SPM

Joel Herrera, Esteban Luna, José A. Araiza-Durán, Luis Salas, Erika Sohn, Ilse Plauchu Frayn, Elfego Ruiz, and Irene Cruz-Gonzalez
Appl. Opt. 56(5) 1489-1494 (2017)

Long-term stabilization of a heterodyne metrology interferometer down to a noise level of 20 pm over an hour

Yoshito Niwa, Koji Arai, Akitoshi Ueda, Masaaki Sakagami, Naoteru Gouda, Yukiyasu Kobayashi, Yoshiyuki Yamada, and Taihei Yano
Appl. Opt. 48(32) 6105-6110 (2009)

Heterodyne interferometer with two parallel-polarized input beams for high-resolution roll angle measurement

Jingya Qi, Zhao Wang, Junhui Huang, Qing Wang, and Jianmin Gao
Opt. Express 27(10) 13820-13830 (2019)

Common-path optical heterodyne profilometer: a configuration

Chien Chou, Jenn-chyang Shyu, Yeu-chuen Huang, and Chen-kee Yuan
Appl. Opt. 37(19) 4137-4142 (1998)

Two-wavelength double heterodyne interferometry using a matched grating technique

Zoran Sodnik, Edgar Fischer, Thomas Ittner, and Hans J. Tiziani
Appl. Opt. 30(22) 3139-3144 (1991)