Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Surface profile measurement of doped silicon using near-infrared low-coherence light

Not Accessible

Your library or personal account may give you access

Abstract

A scanning interferometry system based on near-infrared low-coherence interferometry by using a superluminescent diode (SLD) as the light source is presented. The system cannot only measure the surface profile of doped double-sided polished silicon but also measure its optical thickness and refractive index. The measurement system uses near-infrared CCD to detect interferometric light in the near infrared, based on the Michelson interference principle. SLD has low temporal and high spatial coherence and high penetration to doped silicon wafers; thus, higher visibility can be obtained when measuring the rear side. Meanwhile, the optical thickness measured by low coherent scanning interference is compared with the optical thickness obtained by spectrally resolved interferometry to verify the accuracy of the system. Due to the periodic characteristics of interference fringes, the coherence length of the narrowband light source is usually greater than the path length difference of the interferometer. It gives the measurement a phase ambiguity of 2π, which may severely limit the application of the measurement. However, the short coherent length SLD light source used in the project can avoid 2π phase ambiguity problems. Besides, this system can perform full scanning in a larger step and achieve rapid on-line measurement of the target surface.

© 2019 Optical Society of America

Full Article  |  PDF Article
More Like This
High-speed combined NIR low-coherence interferometry for wafer metrology

Hyo Mi Park and Ki-Nam Joo
Appl. Opt. 56(31) 8592-8597 (2017)

Low cost wafer metrology using a NIR low coherence interferometry

Young Gwang Kim, Yong Bum Seo, and Ki-Nam Joo
Opt. Express 21(11) 13648-13655 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved