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Abstract
Based on the mathematical models proposed by the image spherizing algorithm, a novel planeness detecting method for a micro-channel plate (MCP) is presented. After describing the theory of the image spherizing algorithm, a straight line image is chosen as a standard picture, and the imaging simulation for a deformed MCP is performed. According to the simulated results, the deformation characteristic of the MCP and the mechanism of the image twisting phenomenon were analyzed. Finally, the double lines method, which specializes in planeness detection, is proposed. The experimental result obtained by interferometer shows that the profile characteristics of a deformed MCP are consistent with the theoretical analysis. To verify the effectiveness of the double lines method, we measured the planeness of 100 pieces of MCP and then defined the detecting standard: a micro-channel plate will be treated as a defective product when the twisting angle of the two orthogonal lines in the reflected image is greater than 40°, whereas the product will meet the military standard when the twisting angle is smaller than 7°. In this method, the planeness detection could be completed only by observing the reflected image of the MCP, even in a harsh environment. In particular, the accuracy can reach 1 μm and it has been applied to the MCP production process.
© 2019 Optical Society of America
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