Abstract

The decenter error can determine the polychromatic integral diffraction efficiency (PIDE) over a broad wave band of hybrid optical systems and further the imaging quality. The mathematical model of the relationship between the decenter error and the PIDE of multilayer diffractive optical elements (MLDOEs) is presented, and the expressions are derived based on phase delay of diffractive optical elements for both normal and oblique incident situations. Finally, the sensitivity of PIDE to the decenter error for MLDOEs used in a long-infrared wave band with a material combination of ZNS–ZNSE is analyzed, and then the decenter error tolerance is proposed to ensure high PIDE over a broad wave band as well as diffraction efficiency at the designed wavelengths. The analysis methods and results could be useful for guiding the decenter error of MLDOEs in hybrid optical systems for optical engineers.

© 2019 Optical Society of America

Comprehensive polychromatic integral diffraction efficiency sensitivity to tilt error for multilayer diffractive optical elements with oblique incidence

Liangliang Yang, Chenglin Liu, Renjia Guo, and Yongbing Zhao
Appl. Opt. 59(2) 508-514 (2020)

Tolerance analysis of multilayer diffractive optics based on polychromatic integral diffraction efficiency

Shan Mao, Qingfeng Cui, and Mingxu Piao
Appl. Opt. 54(32) 9528-9532 (2015)

Optimal design of depth-scaling error for multilayer diffractive optical elements with oblique incidence

Liangliang Yang, Chenglin Liu, and Shengqiang Li
Appl. Opt. 56(15) 4532-4536 (2017)

Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements

Long Gao, Suet To, Hongfang Yang, Xin Nie, Tianchen Liu, and Changxi Xue
Appl. Opt. 53(31) 7341-7347 (2014)

Optimization and analysis of infrared multilayer diffractive optical elements with finite feature sizes

Chao Yang, Hongfang Yang, Chuang Li, and Changxi Xue
Appl. Opt. 58(10) 2589-2595 (2019)