Abstract

Efficient measurement of a line laser sensor can be achieved by combining it with a multi-axis platform. However, the measuring results are significantly affected by the precision of the platform. To provide a criterion for verifying and compensating for the geometric errors of a platform, a measuring method based on a line laser sensor for angular motion errors is proposed for the first time to the best of our knowledge in this work. The principles of separating and simultaneously detecting the yaw, roll, and pitch errors are elaborated. Based on this, the detection model is built for a three-dimensional platform. Under such an experimental condition, the stability and accuracy of the line laser sensor is tested, and the experimental results revealed small deviations of 3 µm and 10 µm in $z$ axis and $x$ axis, respectively. Ultimately, a series of experiments is performed to verify the feasibility and repeatability of the method. The yaw experimental results indicate that the trend and rule of error conform to the measured value by a laser interferometer, and the maximum variation value is 0.0075 mrad.

© 2020 Optical Society of America

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