Abstract
This paper presents the development of a compensation-based laser sensor system, capable of sensing in-plane as well as out-of-plane displacements of a target. The sensor design integrates principles of laser triangulation and objective laser speckle measurement into a single device and provides an in-plane and out-of-plane resolution of 3 µm and 1 µm, respectively. The compensation-based operation keeps the variation of distance and lateral position relative to the target close to zero by actively following the target motion using feedback control. This enables a large operation range of the resulting sensing and tracking system, limited only by the range of the actuation system. Accurate tracking of target motions is demonstrated in an area of ${{1}} \times {{1}}\;{\rm{mm^2}}$ with a small remaining spatial rms tracking error between 8.75 µm and 13.25 µm.
© 2020 Optical Society of America
Full Article | PDF ArticleMore Like This
Hanlin Zhang, Yongjie Ren, Changjie Liu, and Jigui Zhu
Appl. Opt. 53(20) 4405-4412 (2014)
Yan Guo, Haobo Cheng, Yongfu Wen, and Yunpeng Feng
Appl. Opt. 59(8) 2262-2269 (2020)
Chenzhe Lao, Jianfeng Sun, Peipei Hou, Yu Zhou, Zhiyong Lu, Hongyu He, Ronglei Han, Xinyu Cai, and Yuexin Li
Appl. Opt. 59(22) 6534-6539 (2020)