Spectral irradiance primary scale realization and characterization of deuterium lamps from 200 to 400 nm

Caihong Dai; Zhifeng Wu; Yanfei Wang; Ling Li; Ling Li; Shufang He; Yihang Xie

doi:10.1364/AO.400670

Applied Optics
Vol. 59,
Issue 27,
pp. 8494-8504
(2020)
•https://doi.org/10.1364/AO.400670

Spectral irradiance primary scale realization and characterization of deuterium lamps from 200 to 400 nm

Caihong Dai, Zhifeng Wu, Yanfei Wang, Ling Li, Shufang He, and Yihang Xie

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Caihong Dai, Zhifeng Wu, Yanfei Wang, Ling Li, Shufang He, and Yihang Xie, "Spectral irradiance primary scale realization and characterization of deuterium lamps from 200 to 400 nm," Appl. Opt. 59, 8494-8504 (2020)

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Abstract

To meet the increasing metrology demand of spectral irradiance in the short UV spectral range, a new spectral irradiance scale from 200 to 400 nm was realized at National Institute of Metrology (NIM) based on a high-temperature blackbody BB3500M, and a group of stable deuterium lamps are used as the transfer standards. Accurate real-time temperature of a blackbody is derived to reduce the temperature drift during the measurement period. A combination of an absolute and relative measurement system is designed to reduce repeatability uncertainty, and a selective optical filter method is used to remove fluorescence with a peak at 330 nm. A seven-point bandwidth novel correction method based on differential quadrature formula is put forward to correct the bandwidth error of the monochromator. The expanded uncertainties of the new spectral irradiance scale are 5.3% at 200 nm, 1.8% at 250 nm, 1.9% at 330 nm, and 3.6% at 400 nm, respectively. In the overlap wavelength from 250 to 400 nm, the average deviation between two types transfer standards, deuterium lamps and tungsten halogen lamps, is verified to be 0.39%, which are consistent with the associated measurement uncertainties.

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No.	Device	Type	Manufacturer	Descriptions and Uncertainty ( $k = 2$ )
1	Blackbody	BB3500M	VNIIOFI, Russia	Temperature range: 2300–3500 K, Cavity: depth of 30 mm, diameter of 59 mm opening diameter:15 mm, effective emissivity:0.999,
2	Pyrometer	LP5	KE Technology GmbH, Germany	Range: 1100–3300 K, Fixed focal length: 700 mm. Temperature resolution: 0.001 K ( $T = 3021 K$ ) Calibrated by three fixed-point blackbodies of NIM. Pt- $C : T = 2011.05 K$ , $U = 0.50 K$ ; $R e - C : T = 2746.97 K$ , $U = 0.95 K$ ; WC-C $: T = 3020.6 K$ , $U = 1.00 K$ .
3	Monochromator	M207D	McPherson, U.S.A.	Spectral Range: 200–3000 nm Focal length: 0.67 meter, f/No.: 5.8, Dispersion: 0.83 nm/mm, Grating: 1800 g/mm, blazed at 250 nm.
4	Detector	R7446	Hamamatsu, Japan	Spectral response: 160–680 nm, wavelength of maximum response: 400 nm, Low dark current: 0.1 nA
5	Aperture	$ϕ$ 8 mm	VNIIOFI, Russia	Diameter: 8.5325 mm, $U_{rel} = 0.0506 %$ . Area: $57.1798 {m m}^{2}$ , $U_{rel} = 0.1012 %$ .
6	Digital voltage meter	34420 A	Agilent	$0.01 V \sim 100 V$ ; Accuracy: 0.005% $U = 12 \times 10^{- 6} V \sim 6 \times 10^{- 6} V$ .
7	Standard resistance	BZ6	Shanghai Ammeter Factory of China	0.01 class; 0.01Ω,10 A $U = 22 \times 10^{- 6} Ω$
8	Long-pass cut-on filter	UC280	Nantong GuoGuang Inc, China	Thickness: 2 mm Transmittance at 280 nm: $\geq 45 %$ Transmittance at 350 nm: $\geq 89.5 %$
9	PTFE-coating integrating sphere	$ϕ$ 8 mm	Changchun Institute of Optics and Machinery, China	Material of coating: pressed by Tetrafluoroethylene powder, and sintered at more than 300 centigrade. Internal diameter: 50 mm, Diameter of entrance port : 12 mm, Width and height of exit port: 2 and 10 mm
10	Deuterium lamp system	DLS-J1016-01	Dr. Schreder GmBH, Germany	30 W; the system consists of one housed deuterium lamp, a power supply, and a SiC monitor detector.
11	Quartz tungsten halogen lamp	BN-9101	Gigahertz-Optik GmBH, Germany	1000 W, 120 V OSRAM Sylvania FEL lamp

Wavelength/nm	Relative Value	Absolute Spectral Irradiance / $µ W {c m}^{- 2}$ ${n m}^{- 1}$	Conversion Factor $K_{λ}$	Average Conversion Factor $K_{ave}$	Calculated Absolute Spectral Irradiance $/ µ W$ ${c m}^{- 2} {n m}^{- 1}$
200	4.515E-02	/	/	/	4.649E-02
205	4.472E-02	/	/	/	4.604E-02
210	4.419E-02	/	/	/	4.550E-02
215	4.321E-02	/	/	/	4.450E-02
220	4.180E-02	/	/	/	4.304E-02
225	3.930E-02	/	/	/	4.047E-02
230	3.755E-02	3.864E-02	1.0291	1.0297	/
240	3.256E-02	3.348E-02	1.0281		/
250	2.773E-02	2.851E-02	1.0280		/
260	2.335E-02	2.406E-02	1.0302		/
270	1.964E-02	2.028E-02	1.0325		/
280	1.663E-02	1.712E-02	1.0292		/
290	1.405E-02	1.450E-02	1.0324		/
300	1.193E-02	1.233E-02	1.0331		/
310	1.026E-02	1.060E-02	1.0331		/
320	8.972E-03	9.248E-03	1.0308		/
330	7.877E-03	8.085E-03	1.0265		/
340	6.980E-03	7.165E-03	1.0265		/
350	6.192E-03	6.355E-03	1.0263		/

Wavelength /nm	Signal Containing Fluorescence/V (without 280 nm filter)	Signal Without Fluorescence/V (using a 280 nm filter)	Signal of Fluorescence $/ V$	Ratio of Fluorescence to Signal $/ %$
280	3.816E-02	3.820E-02	−3.919E-05	−0.10
290	1.814E-02	1.794E-02	2.071E-04	1.15
300	2.586E-02	2.517E-02	6.818E-04	2.71
310	2.861E-02	2.767E-02	9.387E-04	3.39
320	3.013E-02	2.855E-02	1.578E-03	5.53
330	3.334E-02	3.130E-02	2.042E-03	6.52
340	8.470E-03	7.897E-03	5.726E-04	7.25
350	7.632E-03	7.104E-03	5.277E-04	7.43
360	6.334E-03	5.856E-03	4.776E-04	8.16
370	5.488E-03	5.207E-03	2.804E-04	5.39
380	4.966E-03	4.833E-03	1.324E-04	2.74
380	4.966E-03	4.833E-03	1.324E-04	2.74
390	2.731E-03	2.697E-03	3.383E-05	1.25
400	3.127E-03	3.110E-03	1.617E-05	0.52

Effects		Between Wavelengths	200	210	220	230	240	250	280	300	330	350	380	400
Type A Uncertainty in Value/%	Repeatability % $u_{1}$	uncorrelated	1.50	1.30	1.00	0.80	0.60	0.40	0.40	0.40	0.30	0.50	0.60	0.90
Type B	Reproducibility of realignment % $u_{2}$	fully correlated	1.55	1.30	1.10	0.90	0.70	0.43	0.43	0.35	0.35	0.60	0.60	0.95
Uncertainty in	Temperature measurement of HTBB % $u_{3}$	fully correlated	0.50	0.48	0.46	0.44	0.42	0.40	0.36	0.33	0.30	0.29	0.26	0.25
Value/%	Nonuniformity of HTBB /% $u_{4}$	uncorrelated	0.09	0.09	0.08	0.08	0.08	0.07	0.06	0.06	0.05	0.05	0.05	0.05
	Instability of HTBB% $u_{5}$	uncorrelated	0.06	0.06	0.06	0.06	0.06	0.05	0.05	0.04	0.04	0.04	0.04	0.03
	Emisivity % $u_{6}$	uncorrelated	0.10	0.10	0.10	0.10	0.10	0.10	0.08	0.08	0.06	0.06	0.06	0.06
	Absorption of carbon-based molecule % $u_{7}$	uncorrelated	0.50	0.50	0.50	0.50	0.50	0.40	0.40	0.40	0.40	0.30	0.30	0.30
	Air refractive index n % $u_{8}$	fully correlated	0.04	0.04	0.04	0.04	0.04	0.03	0.03	0.03	0.03	0.02	0.02	0.02
	Area of the water-cooled aperture % $u_{9}$	fully correlated	0.10	0.10	0.10	0.10	0.10	0.10	0.10	0.10	0.10	0.10	0.10	0.10
	Nonlinearity of the measurement system % $u_{10}$	fully correlated	0.80	0.70	0.50	0.45	0.35	0.30	0.30	0.40	0.60	0.70	0.90	1.00
	Current % $u_{11}$	fully correlated	0.17	0.16	0.16	0.15	0.15	0.14	0.13	0.12	0.11	0.10	0.09	0.08
	Wavelength % $u_{12}$	fully correlated	0.25	0.19	0.18	0.18	0.17	0.16	0.12	0.11	0.09	0.08	0.03	0.03
	Bandwidth % $u_{13}$	fully correlated	0.86	0.12	0.07	0.04	0.04	0.04	0.02	0.02	0.08	0.08	0.30	0.50
	Distance % $u_{14}$	fully correlated	0.05	0.05	0.05	0.05	0.05	0.05	0.05	0.05	0.05	0.05	0.05	0.05
	Stray light % $u_{15}$	fully correlated	0.50	0.25	0.20	0.15	0.12	0.10	0.10	0.10	0.10	0.10	0.10	0.10
	Approximation of geometric factor g % $u_{16}$	fully correlated	0.01	0.01	0.01	0.01	0.01	0.01	0.01	0.01	0.01	0.01	0.01	0.01
	Conversion factor of relative measurement % $u_{17}$	fully correlated	0.21	0.21	0.21	0.21	0.00	0.00	0.00	0.00	0.00	0.00	0.00	0.00
	Fluorescence correction and reflection % $u_{18}$	fully correlated	0.00	0.00	0.00	0.00	0.00	0.00	0.22	0.22	0.25	0.28	0.25	0.22
Combined uncertainty of uncorrelated $/ %$			1.6	1.4	1.1	1.0	0.8	0.6	0.6	0.6	0.5	0.6	0.7	1.0
Combined uncertainty of fully correlated $/ %$			2.1	1.6	1.4	1.2	0.9	0.7	0.7	0.7	0.8	1.0	1.2	1.5
Combined uncertainty $u_{c}$ (%) $k = 1$			2.6	2.1	1.8	1.5	1.2	0.9	0.9	0.9	1.0	1.2	1.4	1.8
$U$ (%) $k = 2$			5.3	4.3	3.5	3.0	2.4	1.8	1.8	1.8	1.9	2.4	2.7	3.6

No.	Device	Type	Manufacturer	Descriptions and Uncertainty ( $k = 2$ )
1	Blackbody	BB3500M	VNIIOFI, Russia	Temperature range: 2300–3500 K, Cavity: depth of 30 mm, diameter of 59 mm opening diameter:15 mm, effective emissivity:0.999,
2	Pyrometer	LP5	KE Technology GmbH, Germany	Range: 1100–3300 K, Fixed focal length: 700 mm. Temperature resolution: 0.001 K ( $T = 3021 K$ ) Calibrated by three fixed-point blackbodies of NIM. Pt- $C : T = 2011.05 K$ , $U = 0.50 K$ ; $R e - C : T = 2746.97 K$ , $U = 0.95 K$ ; WC-C $: T = 3020.6 K$ , $U = 1.00 K$ .
3	Monochromator	M207D	McPherson, U.S.A.	Spectral Range: 200–3000 nm Focal length: 0.67 meter, f/No.: 5.8, Dispersion: 0.83 nm/mm, Grating: 1800 g/mm, blazed at 250 nm.
4	Detector	R7446	Hamamatsu, Japan	Spectral response: 160–680 nm, wavelength of maximum response: 400 nm, Low dark current: 0.1 nA
5	Aperture	$ϕ$ 8 mm	VNIIOFI, Russia	Diameter: 8.5325 mm, $U_{rel} = 0.0506 %$ . Area: $57.1798 {m m}^{2}$ , $U_{rel} = 0.1012 %$ .
6	Digital voltage meter	34420 A	Agilent	$0.01 V \sim 100 V$ ; Accuracy: 0.005% $U = 12 \times 10^{- 6} V \sim 6 \times 10^{- 6} V$ .
7	Standard resistance	BZ6	Shanghai Ammeter Factory of China	0.01 class; 0.01Ω,10 A $U = 22 \times 10^{- 6} Ω$
8	Long-pass cut-on filter	UC280	Nantong GuoGuang Inc, China	Thickness: 2 mm Transmittance at 280 nm: $\geq 45 %$ Transmittance at 350 nm: $\geq 89.5 %$
9	PTFE-coating integrating sphere	$ϕ$ 8 mm	Changchun Institute of Optics and Machinery, China	Material of coating: pressed by Tetrafluoroethylene powder, and sintered at more than 300 centigrade. Internal diameter: 50 mm, Diameter of entrance port : 12 mm, Width and height of exit port: 2 and 10 mm
10	Deuterium lamp system	DLS-J1016-01	Dr. Schreder GmBH, Germany	30 W; the system consists of one housed deuterium lamp, a power supply, and a SiC monitor detector.
11	Quartz tungsten halogen lamp	BN-9101	Gigahertz-Optik GmBH, Germany	1000 W, 120 V OSRAM Sylvania FEL lamp

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Applied Optics