Design of a chromatic confocal displacement sensor integrated with an optical laser head

A. Zakrzewski; M. Ćwikła; P. Koruba; P. Jurewicz; J. Reiner

doi:10.1364/AO.403335

Applied Optics
Vol. 59,
Issue 29,
pp. 9108-9117
(2020)
•https://doi.org/10.1364/AO.403335

Design of a chromatic confocal displacement sensor integrated with an optical laser head

A. Zakrzewski, M. Ćwikła, P. Koruba, P. Jurewicz, and J. Reiner

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A. Zakrzewski, M. Ćwikła, P. Koruba, P. Jurewicz, and J. Reiner, "Design of a chromatic confocal displacement sensor integrated with an optical laser head," Appl. Opt. 59, 9108-9117 (2020)

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Abstract

In this paper, the methodology for design of the system consisting of chromatic confocal displacement sensor integrated with an optical laser head was presented. Furthermore, the results of experimental characterization of optical components of the laser head were also included in the numerical analysis. The designed chromatic confocal displacement sensor was analyzed as an assembly of components widely available on the optical market. Nevertheless, the main goal of the numerical optimization was to determine the influence of individual components of the optical path of the system on its parameters, i.e., measuring range, FWHM of the characteristic spectral peak, and intensity that reaches the detector. The optimized solution was characterized in order to determine the calibration curve, as well as other important application parameters of the system. Moreover, taking into consideration the integration aspect the caustic of the laser beam shaped by the laser head was measured. Finally, the versatility of the system was presented and discussed.

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No.	${M a t}_{1}$	${M a t}_{2}$	${E F L}_{1}$ (mm)	${E F L}_{2}$ (mm)	LCA (mm)	$I_{g e o}$ (%)	FWHM (nm)	$Q_{S}$
1	S-LAH64	S-LAH64	12.0	20.0	84.7	100.0	58	0.399
2	S-LAH64	S-LAH64	10.0	20.0	79.8	72.3	43	0.592
3	S-LAH64	S-LAH64	12.0	18.0	96.9	81.0	63	0.639
4	S-LAH64	S-LAH64	10.0	18.0	91.0	56.3	46	0.789
5	S-LAH64	S-LAH64	8.0	20.0	74.6	42.3	29	0.811
6	S-LAH64	S-LAH64	8.0	18.0	84.6	36.0	33	0.914
7	H-LaK54	S-LAH64	6.2	20.0	67.3	25.0	20	0.925
8	H-LaK54	S-LAH64	7.5	20.0	71.8	25.0	26	0.964
9	H-LaK54	S-LAH64	4.6	20.0	64.6	16.0	12	0.969
10	H-LaK54	S-LAH64	7.5	18.0	81.9	25.0	28	0.994
11	H-LaK54	S-LAH64	6.2	18.0	75.6	20.3	22	0.998
12	H-LaK54	S-LAH64	6.2	15.0	93.3	25.0	25	1.002
13	H-LaK54	S-LAH64	4.6	18.0	72.4	12.3	13	1.027
14	D-ZK3	S-LAH64	8.0	20.0	70.4	20.3	31	1.033
15	D-ZK3	S-LAH64	6.2	20.0	66.6	12.3	20	1.050
16	D-ZK3	S-LAH64	8.0	18.0	79.5	20.3	33	1.061
17	H-LaK54	S-LAH64	4.6	15.0	88.5	12.3	15	1.069
18	D-ZK3	S-LAH64	6.2	18.0	74.8	12.3	22	1.077
19	D-ZK3	S-LAH64	6.2	15.0	92.0	12.3	25	1.126
20	D-ZK3	S-LAH64	8.0	15.0	96.0	20.3	39	1.130

No.	$O F_{I N} - A A D_{I N}$ (mm)	$A S H_{1} - A S H_{2}$ (mm)	WD (mm)	LCA (mm)
1		24.085	284.9	98.4
2		24.185	266.9	92.6
3	22.261	24.285	249.8	87.3
4		24.385	234.1	82.5
5		24.485	219.2	78.1
6	23.261		236.6	83.1
7	22.761		243.2	85.2
8	21.761	24.285	256.9	89.6
9	21.261		263.9	92.0

Method	Sensor	Process	Measurement Type	Resolution (mm)	Measuring Range (mm)
Chromatic aberration	Optical spectrum analyzer	LC	Coaxial point	$\sim 0.16$	$\sim 87$
CCD camera	Three cameras [32]	LC	Lateral area	0.02	7
Triangulation	Coaxially integrated CCD camera and 532 nm laser [33]	LC	Coaxial point	0.27	20
	Line laser illumination with CCD camera [34]	LC	Lateral line	0.05	47
	Structured light laser with CMOS camera [35]	LW	Lateral line	0.24	70
Structured light 3D scanning	SLS3 3D scanner HP [36]	LC	Lateral area	0.05	60
Low coherence	IDM Precitec [37]	KLW	Coaxial point	0.05	10
interference	LD-600 Kingston [38]	SLM	Coaxial point	0.02	60

No.	${M a t}_{1}$	${M a t}_{2}$	${E F L}_{1}$ (mm)	${E F L}_{2}$ (mm)	LCA (mm)	$I_{g e o}$ (%)	FWHM (nm)	$Q_{S}$
1	S-LAH64	S-LAH64	12.0	20.0	84.7	100.0	58	0.399
2	S-LAH64	S-LAH64	10.0	20.0	79.8	72.3	43	0.592
3	S-LAH64	S-LAH64	12.0	18.0	96.9	81.0	63	0.639
4	S-LAH64	S-LAH64	10.0	18.0	91.0	56.3	46	0.789
5	S-LAH64	S-LAH64	8.0	20.0	74.6	42.3	29	0.811
6	S-LAH64	S-LAH64	8.0	18.0	84.6	36.0	33	0.914
7	H-LaK54	S-LAH64	6.2	20.0	67.3	25.0	20	0.925
8	H-LaK54	S-LAH64	7.5	20.0	71.8	25.0	26	0.964
9	H-LaK54	S-LAH64	4.6	20.0	64.6	16.0	12	0.969
10	H-LaK54	S-LAH64	7.5	18.0	81.9	25.0	28	0.994
11	H-LaK54	S-LAH64	6.2	18.0	75.6	20.3	22	0.998
12	H-LaK54	S-LAH64	6.2	15.0	93.3	25.0	25	1.002
13	H-LaK54	S-LAH64	4.6	18.0	72.4	12.3	13	1.027
14	D-ZK3	S-LAH64	8.0	20.0	70.4	20.3	31	1.033
15	D-ZK3	S-LAH64	6.2	20.0	66.6	12.3	20	1.050
16	D-ZK3	S-LAH64	8.0	18.0	79.5	20.3	33	1.061
17	H-LaK54	S-LAH64	4.6	15.0	88.5	12.3	15	1.069
18	D-ZK3	S-LAH64	6.2	18.0	74.8	12.3	22	1.077
19	D-ZK3	S-LAH64	6.2	15.0	92.0	12.3	25	1.126
20	D-ZK3	S-LAH64	8.0	15.0	96.0	20.3	39	1.130

No.	$O F_{I N} - A A D_{I N}$ (mm)	$A S H_{1} - A S H_{2}$ (mm)	WD (mm)	LCA (mm)
1		24.085	284.9	98.4
2		24.185	266.9	92.6
3	22.261	24.285	249.8	87.3
4		24.385	234.1	82.5
5		24.485	219.2	78.1
6	23.261		236.6	83.1
7	22.761		243.2	85.2
8	21.761	24.285	256.9	89.6
9	21.261		263.9	92.0

Abstract

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Applied Optics