Abstract

In this study, the effects of the coating film thickness on a grating interferometry system were analyzed. The asymmetry-induced error of the deformed phase grating varied periodically with the coating film thickness, due to the spurious interference of multiple reflections in the film layer and asymmetry in the amplitudes of the diffraction orders, which led to phase offsets (and thus position errors). The average error obtained with a multiorder interferometer was compared to that simulated by atomic force microscopy. The simulation and measurement results were consistent with the theoretical analysis, which will facilitate accurate measurement error analysis.

© 2020 Optical Society of America

Influence of asymmetric grating structures on measurement accuracy in integrated phase grating interference-based metrology

Tao Zhang, Xingyu Zhao, Jiwen Cui, and Jiubin Tan
Appl. Opt. 58(7) 1847-1854 (2019)

Optimized wavelength selection for diffraction-based overlay measurement by minimum asymmetry factor variation with finite-difference time-domain simulation

Hung-Chih Hsieh, Jui-Ming Cheng, and Yun-Chi Yeh
Appl. Opt. 61(6) 1389-1397 (2022)

Measurement of surface roughness of thin films by a hybrid interference microscope with different phase algorithms

Chuen-Lin Tien, Kuo-Chang Yu, Tsung-Yo Tsai, Chern-Sheng Lin, and Chi-Yuan Li
Appl. Opt. 53(29) H213-H219 (2014)

Heterodyne period measurement in a scanning beam interference lithography system

Shan Jiang, Bo Lü, Ying Song, Zhaowu Liu, Wei Wang, Li Shuo, and Bayanheshig
Appl. Opt. 59(19) 5830-5836 (2020)

Measurement of phase differences between the diffracted orders of deep relief gratings

C. M. B. Cordeiro, L. Cescato, A. A. Freschi, and Lifeng Li
Opt. Lett. 28(9) 683-685 (2003)