Application of electric field and moderately elevated temperature depletes the side facing anode from alkali present in glasses. The change of composition of the treated glass results in variation of refractive index depth profile within the treated glass. Spectroscopic ellipsometry is employed for characterization of optical properties of glass treated in different conditions. The results of optical characterization are verified by secondary ion mass spectroscopy. It is found that the refractive index profile obtained from ellipsometry has a maximum value higher than the one of untreated glass. The obtained refractive index profiles are in very good agreement with concentration profiles.
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