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Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

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Abstract

Optical properties of low-temperature pulsed DC-sputter deposited ($ {\le} {70° {\rm C}}$) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.

© 2020 Optical Society of America

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