Abstract
Based on the diffraction effect of the waveguide grating, a hybrid structure of an all-dielectric multilayer film and a sub-wavelength dielectric grating is proposed. The discrete state provided in the sub-wavelength waveguide grating couples with the continuous state provided in the Fabry–Perot cavity (F–P cavity) containing the photonic crystal to form a Fano resonance. The relationship between the structural parameter and the incident angle is analyzed by numerical simulation. The result shows that the figure of merit (FOM) value is $533.2\;{{\rm RIU}^{- 1}}$. This structure provides an effective theoretical basis for the realization of Fano resonance in the all-dielectric sensing structure.
© 2021 Optical Society of America
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