Abstract

The fabrication of ridge waveguides in calcium fluoride (${\rm CaF}_2$) crystal working at the mid-infrared wavelength was studied. First, the planar waveguide was fabricated by using ${{\rm O }^{5 +}}$ ion irradiation, and then the ridge waveguide structure was manufactured by precise diamond blade dicing. The propagation loss was measured by end-face coupling arrangement, and then annealing treatment was implemented to optimize the waveguide performance, and the propagation loss was finally reduced to 0.5 dB/cm. We measured the Raman spectra of the waveguide and substrate to observe the damage to the material lattice caused by ${{\rm O }^{5 +}}$ ion irradiation technology.

© 2021 Optical Society of America

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