Abstract

Utilizing the near-field enhancement effect of a polystyrene microsphere, direct ablation of nanohole arrays by a temporal-shaping femtosecond (fs) laser pulse is presented. The nanohole arrays, which are circular, regular, and free of cracks, were processed without extra post-processing, and their average diameter decreased gradually, as the double-pulse delay increased until 2500 fs. The simulated results by a plasma model and finite difference time domain solution demonstrate that the size decrease of the structure is attributed to the increase of the ablation threshold of silicon. Through fs laser near-field fabrication, the FWHM of nanoholes can be reduced to approximately 50 nm ($\lambda /{{16}}$) and even to 23 nm when using the second harmonic laser at a wavelength of 400 nm.

© 2021 Optical Society of America

Femtosecond laser double pulse Bessel beam ablation of silicon

Dongkai Chu, Weizhen Li, Shuoshuo Qu, Xinran Dong, and Peng Yao
Appl. Opt. 60(35) 10802-10806 (2021)

Asymmetric femtosecond laser ablation of silicon surface governed by the evolution of surface nanostructures

Cheng-Yun Zhang, Jian-Wu Yao, Chang-Qing Li, Qiao-Feng Dai, Sheng Lan, Vyacheslav A. Trofimov, and Tatiana M. Lysak
Opt. Express 21(4) 4439-4446 (2013)

Enhancement of femtosecond laser-induced surface ablation via temporal overlapping double-pulse irradiation

Zhenyuan Lin, Lingfei Ji, and Minghui Hong
Photon. Res. 8(3) 271-278 (2020)

Advanced mechanism of multiphysics fields tip enhancement induced with varied laser power to fabricate pattern-transformable subdiffraction limit nanostructures

HaiLong Yin, Xiangyang Dong, Xuewen Wang, Jianlei Cui, Wenjun Wang, and Xuesong Mei
Appl. Opt. 60(36) 11018-11026 (2021)

Femtosecond laser-induced periodic surface structures on silicon upon polarization controlled two-color double-pulse irradiation

Sandra Höhm, Marcel Herzlieb, Arkadi Rosenfeld, Jörg Krüger, and Jörn Bonse
Opt. Express 23(1) 61-71 (2015)